Development of innovative ALD materials
and tools for high density 3D integrated capacitors
|Fraunhofer Gesellschschaft zur Förderung der Angewandten Forschung e.V. (Fraunhofer IPMS-CNT)||RTD performer||Germany|
|IPDiA SA||SME participant||France|
|Commissariat A L Energie Atomique aux Energies Alternatives (CEA)||RTD performer||France|
|Picosun OY||SME participant||Finland|
|Sentech Instruments GmbH||SME participant||Germany|
IPDiA is a preferred supplier of high performance, high stability and high reliability silicon passive components to customers in the medical, automotive, communication, computer, industrial, and defense/aerospace markets. The company portfolio includes standard component devices such as silicon capacitors, RF filters, RF baluns, ESD protection devices as well as customized devices. IPDiA headquarters are located in Caen, France. The company operates design centers, sales and marketing offices and a manufacturing facility certified ISO 9001 / 14001 / 18001 / 13485 as well as ISO TS 16949 for the Automotive market.
Leti is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defence and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics. NEMS and MEMS are at the core of its activities. An anchor of the MINATEC campus, CEA-Leti operates 8,000-m² of state-of-the-art clean room space on 200mm and 300mm wafer platforms. It employs 1,400 scientists and engineers and hosts more than 190 Ph.D. students and 200 assignees from partner companies. CEA-Leti owns more than 1,700 patent families.
Picosun is an international equipment manufacturer with a world-wide sales and service organization. We develop and manufacture Atomic Layer Deposition (ALD) reactors formicro- and nanotechnology applications. Picosun is based in Espoo, Finland and has its US headquarters in Detroit. PICOSUN™ ALD process tools have been installed in various universities, research institutes, and companies across Europe, USA, Asia and Australia. Dr. TuomoSuntola, the inventor of the ALD method in 1974, is a Member of Picosun Board of Directors. Our CTO Sven Lindfors has continuously designed ALD systems since 1975. Highly committed Picosun personnel have an unparalleled amount of ALD experience and have contributed to more than 100 patents on ALD. Our long history and comprehensive background establishes Picosun as the optimal partner for your ALD technology needs.
SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for Plasma Process Technology, Thin Film Measurement, and Photovoltaics. The medium-sized company founded in 1990 has grown fast over the last decades and has today 60 employees. SENTECH is located in Berlin, capital of Germany, and has moved to its own company building in 2010 in order to expand its production facilities.
SENTECH plasma etchers and deposition systems including ALD support leading-edge applications. They feature high flexibility, reliability, and low cost of ownership. SENTECH’s plasma products are developed and manufactured in-house and thus allow for customer-specific adaptations. More than 300 units have been sold to research facilities and industry for applications in nanotechnology, micro-optics, and optoelectronics.
Fraunhofer IPMS-CNT is a German research institute that develops advanced 300 mm semiconductor process solutions for Front-End and Back-End-of Line applications on state-of-the-art process- and analytical equipment. Research is focused on process development enabling 300 mm production, innovative materials and its integration into Systems (SoC / SiP) as well as nanopatterning through electron beam lithography. Fraunhofer is largest application-oriented research organization in Europe with 66 institutes and 22.000 employees.
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